Tylan FC-2979MEP5-M MFC Mass Flow Controller 500 SCCM CO TEL Unity II Used Part No: 02-00322-00

Part No: 02-00322-00

img{max-width:100%} VAT 26332-KA71-1001 Angle Isolation Valve with Sensor TEL 1D86-003558-16 Used

Part No: RPM5CSCSKCS674

Part No: 03-21659-04

The unit does not have a part number/serial number tag and is missing the upper cover (see photos)

Tylan FC-2979MEP5-M MFC Mass Flow Controller 500 SCCM CO TEL Unity II Used Part No: 02-00322-00Tylan FC 2979MEP5 M MFC Mass Flow Controller 500 SCCM CO TEL Unity II Used Part No: FC 2979MEP5 M Model No: 2979 Series Range Gas: 500 SCCM, CO Interface: 9 Pin D Connector: Surface Mount CE Marked May Require Calibration Removed from a TEL Tokyo Electron U2 855DD Unity II 200mm Plasma Etcher System This Tylan FC 2979MEP5 M MFC Mass Flow Controller is used working surplus. The physical condition is good, but there are signs of previous use and