S02100 - SEMI S21 - 人員防護安全基準 Revision:SEMI S21-1106E - Superseded SEMI D31-0825 (technical revision)

SEMI D31-0825 (technical revision)

1-1015 — Specification for Cluster Tool Module Interface 300 mm: Transport Module End Effector Exclusion Volume

ロード，アンロード状態

Where material contains other material (such as carriers containing wafers)

この文書は，レチクルおよびその他のEESアイテムを使用，あるいは生産する人員へのガイドとして，装置の設計からテストまでの期間に装置製造業者のために使用することが出来る。

S02100 - SEMI S21 - 人員防護安全基準 Revision:SEMI S21-1106E - Superseded SEMI D31-0825 (technical revision)FPD This safety guideline was technically approved by the global Environmental Health & Safety Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on August 24, 2006. It was available at www. semi. org in October 2006. Originally published October 2003. E This standard was editorially modified in February 2007 to correct an error. Changes were made to 7. 2. 3. This safety guideline identifies preferred