F05600 - SEMI F56 - マスフローコントローラの定常供給電圧の影響を測定するための試験方法 StdPbc-0225 Coefficient of thermal expansion and

Coefficient of thermal expansion and glass transition temperature (see SEMI G75

At present only the International Technology Roadmap for Semiconductors (ITRS) serves as a universally accepted working document on how to specify photomasks

North America

Alternative methods or conditions may be used as long as appropriate studies demonstrate recovery between 75%–125% of a known sample spike for half the specification value

SEMI M56-0307 (technical revision)

F05600 - SEMI F56 - マスフローコントローラの定常供給電圧の影響を測定するための試験方法 StdPbc-0225 Coefficient of thermal expansion andglobal Gases Technical Committee20111224global Audits and Reviews Subcommittee20124www. semiviews. org www. semi. org2000320073 : MFCMFCMFC DCMFCDC Referenced SEMI Standards None.