C00355 - SEMI C3.55 - シラン（SiH4），バルク，品質99.994%の仕様 StdPbc-1211 The purpose of the standard

The purpose of the standard is to ensure that modules from different suppliers can be integrated into a radial cluster tool

orgで入手可能となる。初版は1995年2月発行，前版は2004年3月発行。

This Standard is intended to set an appropriate level of specification that places minimal limits on supplier innovation while ensuring opportunities for users to be globally (though possibly not locally) efficient with equipment volumes

SEMI F40 — Practice For Preparing Liquid Chemical Distribution Components for Chemical Testing

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C00355 - SEMI C3.55 - シラン（SiH4），バルク，品質99.994%の仕様 StdPbc-1211 The purpose of the standardglobal Gases Committee2011912global Audits and Reviews Subcommittee201110www. semiviews. org www. semi. org20002 (SiH4) Referenced SEMI Standards None.