E08400 - SEMI E84 - Specification for Enhanced Carrier Handoff Parallel I/O Interface StdPbc-0816

E08400 - SEMI E84 - Specification for Enhanced Carrier Handoff Parallel I/O Interface StdPbc-0816Due to the migration to large wafer sizes, future semiconductor factories will use extensive automated material handling systems (AMHS) to transfer wafer carriers, including FOUPs and open cassettes, of increasing weight. The parallel input output (PI O) control signals between the production equipment and the AMHS must be better defined for more reliable and efficient carrier handoffs (load unload) at production equipment load ports. The purpose of

The scope of this Standard is limited to defining the behavior of Metrology equipment as perceived by a SEMI Equipment Communications Standard 2 Message Content (SECS-II) host that complies with the SEMI E30 model

SEMI C3 — Specifications for Gases

and/or customer’s specified percentages of maximum rated flow

and flatness

This Standard provides specification for implementing basic equipment performance tracking (EPT) for production equipment

ICP-MS is the preferred method because it is more sensitive and efficient

This Standard describes a specific device structure and behavior of a generic equipment networked sensor

and other microelectronic components including microelectromechanical systems (MEMS)

SEMI MF1569-94 (Reapproved 1999) (first SEMI publication)

2  This Specification addresses assembly and packaging including the testing of semiconductor devices

and materials acceptance purposes

SEMI D58-0823 (technical revision)