E00500 - SEMI E5 - 半導体製造装置通信スタンダード2 メッセージ内容（SECS-II） Revision:SEMI E5-0611 - Superseded org in June 2007

org in June 2007

SEMI D59-0710 (Reapproved 1224)

This Specification defines the standard for substrates used to fabricate flat panel display masks

Specification and Guide for Boron Trichloride (BCI3)

The EUV Pod is to be used when a conventional reticle carrier does not meet the requirements of EUVL

E00500 - SEMI E5 - 半導体製造装置通信スタンダード2 メッセージ内容（SECS-II） Revision:SEMI E5-0611 - Superseded org in June 2007NOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. SEMI SEMI SEMI2SECS IIJEIDA12 SECS II1SECS I 6 SECS II SECS IIIC SECS IISECS I SECS II SECS II SECS II Referenced SEMI Standards (purchase separately) SEMI E4 Specification for SEMI Equipment Communications Standard 1 Message Transfer (SECS I)