F03300 - SEMI F33 - Test Method for Calibration of Atmospheric Pressure Ionization Mass Spectrometer (APIMS) Revision:SEMI F33-0998 - Superseded Installing effective and efficient facilities

Installing effective and efficient facilities power conditioning requires identification of appropriate conditioning technologies and properly applying the conditioning equipment

This Standard was technically approved by the Liquid Chemicals Global Technical Committee

注意：本文書は，SEMI E155に替わるものである。

1 — Provisional Mechanical Specification for FOUPs Used to Transport and Store 300 mm Wafers

このドキュメントは原子吸光分光法，プラズマイオン源質量分光法そして誘導結合プラズマ原子発光分光法のような機器分析によって，フォトレジスト中のトレースメタル濃度をppbレベルで測定する事に対して適用する。

F03300 - SEMI F33 - Test Method for Calibration of Atmospheric Pressure Ionization Mass Spectrometer (APIMS) Revision:SEMI F33-0998 - Superseded Installing effective and efficient facilitiesThis standard was technically approved by the global Gases Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 13, 2008. It was available at www. semi. org in June 2008. Originally published in 1998. NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and