F00600 - SEMI F6 - Guide for Secondary Containment of Hazardous Gas Piping Systems StdPbc-0822 Originally published October 2000

Originally published October 2000

and polysulfone) commonly used individually or in assemblies to remove particles from gas lines

アドバンシングFOUPセンシングパッド　 (2)

專門用語

This reference Document is intended to outline for the user the common systems configurations

F00600 - SEMI F6 - Guide for Secondary Containment of Hazardous Gas Piping Systems StdPbc-0822 Originally published October 2000The purpose of this document is to provide a guide for the design, fabrication, and operation of secondarily contained distribution piping for hazardous production material (HPM) gases. This guide covers the general requirements for hazardous production material distribution piping in those industries that are included under the H 6 Classification of the Uniform Building Code, or Articles 51 or 80 of the Uniform Fire Code, or of other applicable local