E08600 - SEMI E86 - Provisional Specification for CIM Framework Factory Labor Component StdTpc-Silicon on Insulator SEMI MF84-0312 (Reapproved 0718)

SEMI MF84-0312 (Reapproved 0718)

line defects

together with the referenced standards

This Guide provides recommendations to help assure that facility static charge limits are appropriate for the product being manufactured

帯電した表面への異物吸着を低減する。

E08600 - SEMI E86 - Provisional Specification for CIM Framework Factory Labor Component StdTpc-Silicon on Insulator SEMI MF84-0312 (Reapproved 0718)This specification was technically approved by the global Information & Control Committee and is the direct responsibility of the North American Information & Control Committee. Current edition approved by the North American Regional Standards Committee on October 21, 1999. Initially available at www. semi. org January 2000; to be published February 2000. Originally published September 1999. The Factory Labor Component provides the capability to