T01600 - SEMI T16 - 極紫外線マスク自動識別用データマトリクス記号法適用の仕様 Revision:SEMI T16-0706 - Superseded 1e12-1e13 C atoms/cm2

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1e12-1e13 C atoms/cm2

Orders received during non-business hours will be processed on the next business day (Monday-Friday

a fitting body temperature range of 23°C to 125°C (73°F to 257°F) should be maintained

Now think about the different types of hazardous energy used to operate that equipment

The accuracy of the critical dimensions of the notch controls the possible accuracy of the alignment

T01600 - SEMI T16 - 極紫外線マスク自動識別用データマトリクス記号法適用の仕様 Revision:SEMI T16-0706 - Superseded 1e12-1e13 C atoms/cm2Notice: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. SEMI global Traceability Committee2006516global Audits and Reviews Subcommittee20066www. semi. org200511 EUV SEMI P37SEMI P386 6 Referenced SEMI Standards SEMI P37 Specification for Extreme Ultraviolet Lithography Mask Substrates SEMI P38

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