P03500 - SEMI P35 - マイクロリソグラフィメトロロジの用語法 StdPbc-1025 2-1225 — Specification for Protocol
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Description
2-1225 — Specification for Protocol Buffers for Equipment Self Description (EqSD)
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The formats for data produced as a result of executing a data collection plan are also defined
As long as management on this specification and above requirement is expected on an equipment
These standards include
P03500 - SEMI P35 - マイクロリソグラフィメトロロジの用語法 StdPbc-1025 2-1225 — Specification for Protocolglobal Micropatterning Committeeglobal Audits and Reviews Subcommittee2006824200610www. semi. org 200611CD ROM2000220047 Referenced SEMI Standards SEMI E89 Guide for Measurement System Analysis (MSA) SEMI P28 Specification for Overlay Metrology Test Patterns for Integrated Circuit Manufacture
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