MF072800 - SEMI MF728 - Practice for Preparing an Optical Microscope for Dimensional Measurements Revision:SEMI MF728-1106 (Reapproved 1111) - Superseded The results of this test

The results of this test can be used for the qualitative ranking of gas delivery components based on the design as it relates to moisture dry-down performance of the system

The orientation of a wafer flat is the orientation of the surface of the flat (on the edge of the wafer)

originally published November 2004

SEMI E80-0299 (Reapproved 0915)

The rinse test method evaluates performance in a flushing mode while the component is in a static state (no actively moving components within the component under test)

MF072800 - SEMI MF728 - Practice for Preparing an Optical Microscope for Dimensional Measurements Revision:SEMI MF728-1106 (Reapproved 1111) - Superseded The results of this testDimensional measurements made with an optical microscope are made on the optical image of the specimen and not directly on the specimen itself. The method of illuminating the specimen affects the image content, including the appearance of edges which are used in defining the size of the specimen. This Practice includes adjusting the microscope for Kohler illumination, which provides uniform illumination of the specimen, reduces stray light, and